Pushing the resolution limits: 200nm features and true 400 nm pitch gratings.

Raith Laser Systems has demonstrated how the capabilities of the PicoMaster system can be extended to bridge the gap between light-based lithography and electron-beam lithography, enabling smaller features and greater accuracy, thus expanding the range of optical security features that a PicoMaster-H system can offer.

MNE2024-Bridging_the_gaps-200nm_gratings.pdf

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A 400nm pitch diffraction grating written using a PicoMaster 200 system